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Fluid Intelligence

Sensor designed for micro-particle filtration through cleanroom process - soft lithography, mask design, and exposure on a Silicon wafer. This was used as a mould for PDMS to replicate the sensor and test with fluorescent microbeads. The microposts were designed in an organic form to create catchment zones facilitating the flow of the fluid.

Klayout Workflow Design

Quick mapping of process before starting - allowing for efficient use of time and resources.

Abstract geometric design with circular elements.

Sensor design

Different forms were explored to minimize bubbles and overflow from the edges. Radial turned out to be the most efficient.

Two rectangular microfluidic devices with circular ends.

PDMS on Silicon Wafer

3D check of moulds and casting

Circular diagram with central and surrounding nodes.

Radial sensor with 4 outlets

Designed to maximize throughput and ensure minimal stagnation around the annular ring.

Abstract geometric design with red and blue lines.

Fabrication Process

Step by step fabrication was documented for 1. Mask design, 2. Si wafer exposure and 3. PDMS Casting

Pattern of green teardrop shapes on yellow background.

Microscopic view

Mask under the microscope before Chromium etching

Abstract blue pattern with leaf-like shapes.

Microscopic view

Wafer under the microscope after exposure and lift off.

Microscopic view - Circular sensor

Wafer under the microscope after exposure and lift off.

Microscopic view - Rectangular sensor

Wafer under the microscope after exposure and lift off.

Blue circular pattern with leaf-like border design.

Microscopic view - Radial sensor

Wafer under the microscope after exposure and lift off.

Circular pattern with concentric rings and central hole.

Microscopic view - Radial Sensor in PDMS

PDMS sensor was plasma bonded with a glass plate and inlet/outlet holes were made.

Microbead Solutions

15, 7.32 and 1.8 micron diameter beads were diluted in filtered water in a 1:10 proportion

Abstract red and black pattern with bright highlights.

Fluorescent Microbeads Test

7.32 um beads in red and 15 um beads in green - both successfully filtered in the sensor

Microscopic view of cells with red and green highlights.

Fluorescent Microbeads Test

7.32 um beads in red and 15 um beads in green - both successfully filtered in the sensor

Red abstract pattern with scattered light spots.

Fluorescent Microbeads Test

7.32 um beads in red and 15 um beads in green - both successfully filtered in the sensor

Fluorescent Microbeads Test

15 um beads flow through the first and second layer of the sensor which is 17 um minimum.

Abstract pattern with droplets and curved shapes.

Close up!

Multiple beads clogged up between microposts

Exposure through mask

Silicon wafer was exposed with UV light through the mask.

Lab 1 Screenshot 2

Early sensor testing

Sensor design on Si wafer

Person holding a reflective, circular object with gloves.

Physical Vapor Deposition with Gold

Metal deposition was done in the early prototyping and sensor design stage.

Chromium etching

Chromium etching was done for the mask, with HF

PDMS Pouring

PDMS mixed with a binding agent poured on to the Silicon wafer

Degassing PDMS

PDMS was degassed in vacuum chambers to remove all bubbles.

Manual Cutting

Once the PDMS is baked, it's manually cut out from the petri dish without damaging the wafer.

Laminar flow test for mixed fluids

Proper mixing was tested and laminar flow was successfully achieved in order to resemble real-world fluids.

Modular buttons mould

PDMS Suction cups were designed to easy out-of-lab use without lab equipment or training.

Suction cup on sensor outlet

Pulling the fluid through pneumatic suction from inlet to outlet using a simple button - no lab equipment necessary!

Colorful 3D graph showing displacement magnitude.

COMSOL beam simulation

Early sensor design and testing for a simple cantilever

Graph showing surface displacement magnitude in micrometers.

COMSOL beam simulation

Early sensor design and testing for a simple cantilever

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